Hybrid Integrated Circuits

    Laboratory of vacuum technologies has achieved the next results in the manufacturing of hybrid integrated circuits on ceramic substrates:

    For process of sputtering of resistive alloys we have developed, produced and commercialized small-sized high-performance vacuum machines Nika-2012 and Nika-2013.

    For deposition of conductive layers machines Nika 2012 and -2013 for magnetron sputtering of metals (modifications Resistive Layer Deposition and Conductive Layer Deposition) has been developed . They allow to deposit up to 4 different materials in one process, such as chromium - copper - nickel, vanadium - aluminum, vanadium - copper - nickel, etc.

    Also enable the process of etching resistive layer by ion-beam method from resistive mask (dry etching).