Laboratory of Vacuum Technologies (©Beams&Plasmas) develops and produces 3 series oа vacuum machines Nika, cutting-edge vacuum equipment and system units:

    • radio-frequency plasma generator;
    • circular an linear magnetron sputtering systems;
    • circular and linear cold cathode ion sources;
    • resistive thermal evaporators;
    • high-and low temperature heaters;
    • automated vacuum system control and water distribution units;
    • automatic high-frequency matching devices;
    • electron-beam equipment;
    • equipment modernization kits.

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